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The alignment technology by 6-axial piezo alignment system and MagicVision has accomplished the alignment precision of ±0.2µm or less after bonding in the vacuum chamber. |
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It can be used as surface activation bonder, nanoimprint device by combining the options. |
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The docking with plasma chamber enables the establishment of full-automation environment that supports the mass production of cassette to cassette. |
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| Appearance | |
| Size | W1000xD1000xH1800mm |
| Weight | 900kg |
| Utility | |
| Power supply | Three-phase AC 200V 50A |
| Air Pressure | Dry Air 0.5MPa |
| Gas Purge Nitrogen Dry Air | Clean Air 0.5MPa |
